SMC Diaphragm Valve AP15PA Dimensions Sample Parameter Selection Manual for High Purity Process Gases

SMC Diaphragm Valve AP15PA Dimensions Sample Parameter Selection Manual for High Purity Process Gas Features: Used in industries requiring high purity gases such as semiconductors. Can be used as a gas shut-off valve. There is no spring in the part that contacts the gas, and the driving part is also isolated by a diaphragm, thus reducing the dead zone of the gas path and suppressing the generation of particles.